Product Name: Positive photoresist for KrF CAS Number: None Required Amount: No Info Other Information: Target Film Thickness: Approx. several hundred nm to 500 nmTarget Pattern: Periodic structures on the order of several hundred nm (intended for interference lithography)Substrate / Coating Surface: Cr film, Silicon, Glass, Sapphire, etc.1.Sensitivity and Contrast: Although there are no specific […]
Product Name: BARC //Bottom Anti-Reflective Coating CAS Number: None Required Amount: No Info Other Information: used in KrF lithography/interference lithography
Product Name: TARC //Top Anti-Reflective Coating CAS Number: None Required Amount: No Info Other Information: used in KrF lithography/interference lithography